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专利名称：Polishing apparatus
发明人：Masahiko Miyamato,Nobuo Nakamura,Jyunji
Takashita,Manabu Ando,Katsuo
Kawano,Yoshiaki Nishimura,Satoshi Yuasa
申请号：US08/157440申请日：19931126公开号：US05347763A公开日：19940920
摘要：There is disclosed a polishing apparatus utilizing a gel material as the polishingtool, in which the gel material is rotated in the vicinity of a surface to be polished, or isgiven rotating and rocking motions in direct contact with the surface to be polished.
申请人：CANON KABUSHIKI KAISHA
代理机构：Fitzpatrick, Cella, Harper & Scinto
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